Characterizing porosity in nanoporous thin films using positronium annihilation lifetime spectroscopy
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چکیده
Depth profiled positronium annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics of nanoporous thin films in general and low-dielectric constant ðkÞ thin films in particular. PALS is sensitive to all pores (both closed and open) in the size range from 0.3 to B300 nm and to the closed-to-open pore transition. Deduced pore sizes have been extensively compared with other techniques in an ongoing round-robin with other laboratories. The application of PALS in issues related to Cu/low-k film microchip integration will be demonstrated. r 2003 Elsevier Ltd. All rights reserved.
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تاریخ انتشار 2003